Customer Feedback:
"Our customer installed the MSPL LFC-7300 Flow Controllers and MFC-8800 Flow Controllers on IPEC-776 and Momentum 1000 machines. The stability of these flow controller modules allowed us to control the slurry very accurately within +/- 3% of setpoint and have resulted in a phenomenal savings of 20% to 25%. This has resulted in huge savings of Slurry over the last 7 months and will be recurring savings at our customers wafer fab. Our customers are ecstatic over these savings as this results in multi- million dollars of savings. We are now tracking yield improvements due to uniform slurry delivery during the wafer polishing process as opposed to the pulsating delivery of a peristaltic pump.
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- Johnny (Novellus Machine Integrator)
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